Mainly used in the field of film formation, the formation of a vacuum environment to realize the evaporation of solvents, assisting better film formation.
Glass Size | 300*300*3 | 600*1200*3 | 1200*2400*3 |
Vacuum chamber size(mm) | 400*390*100 | 1900*1300*158 | 2500*1300*158 |
Working vacuum | 10s/10Pa | 10S/10pa | 10S/10pa |
Number of vacuum ports | 1 | 2 | 3 |
Number of broken vacuum ports | 1 | 2 | 2 |
Pumping speed | 75L/s | 610L/s | 958L/s |
Number of mechanical pumps | 1 | 3 | 3 |
Breaking vacuum gas | Dry air/nitrogen |
1. One-piece high sealing chamber design, chamber leakage rate meets the vacuum requirement (related to chamber volume and material outgassing);
2. Adjustable pumping speed, the pressure drop curve can be adjusted according to process requirements;
3. Rapid pumping capacity, vacuum rates can be designed according to customer requirements.;
4. Vacuum chamber pressure stability ≤ 5%;
5. Support product specifications from laboratory grade to mass production grade full size.